ZYGO ZMI-4004 SPM8020-9274-02 MEAS board is used for interferometric measurement system, which can realize nanometer displacement measurement and precise positioning, support multi-channel interferometric measurement, suitable for complex multi-axis system, with high performance signal processing function, provide fast and accurate measurement feedback, and compatible with ZYGO laser interferometer system, such as ZMI series interferometer and optical measurement system, widely used in semiconductor industry.
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